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Product Description
- Advanced Screw Design
- Efficient: cost-effective, minimal maintenance, high uptime
- Flexible: application-oriented
- Short Process Times: due to high pumping speeds
- Robust: anti-corrosion coating on internal components
- Compact Design
COBRA DS 0080/0160 G are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat screens and semiconductors. State-of-the-art COBRA DS screw vacuum pump technology allows powder- and particle-laden media to be evacuated.
COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.
Equipped with high-efficiency motors, the COBRA DS 0080/0160 G offer excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.
Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.
Applications
• High-density plasma CVD (HDP-CVD)
• Rapid thermal processing (RTP)
• Sub-atmospheric CVD (SACVD)
• Metal-organic CVD (MOCVD)
• Plasma-enhanced CVD (PECVD)
• Low-pressure CVD (LPCVD)
• Atomic layer deposition (ALD)
Product Specification
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