Multi Stage Claw Vacuum Pump by Halward

Multi-stage Roots pumps produce clean and dry vacuum for various applications and markets.
 The technology of the multi-stage Roots pumps is the perfect solution here. Its frictionless working pumping module does not require lubricants and sealing material between the rotor and stator. Thus, hydrocarbon vapor backstreaming can be avoided. In the suction chamber of the pumps, no sealing materials are processed. This means the pumps are free of particles, extremely reliable and stable for a long period of time which results in low costs of ownership.

Air-cooled multi-stage Roots pumps have low maintenance and are distinguished through their constant performance. They are used in analytical applications as well as in clean processes for semiconductor production and plasma cleaning. The compact Roots pump can be easily integrated in systems due to their small dimensions. Load locks and transfer chambers from semiconductor and photovoltaic production systems are typical areas of application for this type of pump. The multi-stage Roots pumps with water cooling are produced of robust die cast metal. Just like the Roots vacuum pumping stations, they are used in research and development, vacuum coating and metallurgy when high pumping speed is required.