ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and Etch applications. ULVAC's ECO-SHOCK can be added to the LR/HR/UR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.
Features of dry vacuum pumps
Self-lubricating vanes for oil-free operation.
Monobloc construction for minimum space and maintenance.
Heavy-duty motor to withstand wide voltage conditions (160v~260v).
Extruded aluminum body for better heat dissipation
Fitted with thermal overload protector
Class "B" insulation for better protection
High-temperature grease filled bearings for smooth running and better life.
|Valve Type||Oil Free|