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Product Description
HHV Pumps is an authorized representative for Sales and Support of Screw type Dry Vacuum Pumps from Ebara Technologies, Inc. CA, USA.
Ebara's innovative products provide a host of product enhancements which are known for its;
- Most efficient dry vacuum pumps and Point-of-Use abatement systems
- Highest reliability
- Lowest cost of ownership and operating cost
- Smallest footprint
- Energy efficient
- Reduced clean room particulate load
- Low noise, low vibration
- Incredibly petite products
Ebara is a world leader in the design and manufacture of "dry" mechanical pumps. Ebara’s dry pumps survive the harshest applications such as LPCVD, PECVD, CVD, and metal etch. These pumps are used for many applications in and outside the semiconductor industry where oil back streaming is unacceptable. Custom designs and broad product lines make an Ebara dry pump the pump of choice.
Product Specification
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