2 HP Dry Screw Vacuum Pumps by Busch Vacuum India Pvt Ltd.

Efficient:
cost-effective, long uptime, energy-efficient

Easy servicing:
long service intervals

Reliable:
operationally reliable

Flexible:
application-oriented

Quiet:
noise level < 58 dB(A)
 

The COBRA BA 0100 C is the proven dry screw vacuum pump for the evacuation of load-lock chambers and other demanding processes involved in the production of photovoltaic cells, flat screens and semiconductors. With its efficient air cooling and the highest pumping speed in its performance class, this vacuum pump is ideal for all applications requiring effective, fast and reliable vacuum generation. COBRA vacuum pumps are oil-free and non-contacting, allowing particle-laden media to be evacuated.

The COBRA BA 0100 C is fitted with a highly efficient motor featuring a stand-by mode, thus offering optimum energysaving potential. The compact construction of the COBRA BA 0100 C requires very little space and its extremely low energy requirements keep operating costs to a minimum.

Applications

• High-density plasma CVD (HDP CVD)
• Rapid thermal processing (RTP)
• Sub-atmospheric CVD (SACVD)
• Metal-organic CVD (MOCVD)
• Plasma-enhanced CVD (PECVD)
• Low-pressure CVD (LPCVD)
• Atomic layer deposition (ALD)
• Load-lock applications